Hi,
sorry I can't help very much, I don't know most of those universities. But the main concern is probably the professors and the specific programs you want to study. There are very many fields in CS and a strong CS school is not always the strongest in your area. Another point is the place you'll be living. There is a Los Angeles and there is Ohio... it matters much more for PhD though. The Masters program is only 2 years, not 6. :)
BTW I am applying to USC and GATech and 11 more :)
(I also considered Ohio State, but removed them from the list since they wanted all documents sent by postal mail (instead of online) and that would cause difficulties to my recommenders, and OSU was not a top choice for me neither).
good luck.
Oh, you should see closely what are the funding chances for MS. For PhD you people are awarded some assistantship almost always... but for MS it is not that easy - try to investigate this.